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Yayın Experimental study of dual-ring CMUT array optimization for forward-looking IVUS(IEEE, 2011) Tekeş, Coşkun; Zahorian, Jaime; Gürün, Gökçe; Satir, Sarp; Hochman, Michael; Xu, Toby; Rashid, Muhammad Wasequr; Değertekin, Fahrettin Levent; Karaman, MustafaForward-looking (FL) catheters have guiding and volumetric imaging capacities which are highly desirable for IVUS applications. Large channel and firing counts have to be reduced to enable 3-D real-time imaging and simplify front-end electronics. Recently, we have proposed an optimization procedure for dual ring FL arrays which is based on finding an optimal coarray set using the simulated annealing algorithm. The presented algorithm is based on finding a predefined number of optimal firing set which results in elimination of redundant spatial frequencies in the coarray. In this study, we present the experimental demonstration of the proposed method with fabricated single chip CMUT on CMOS system based FL dual ring arrays. The dual ring CMUT arrays were monolithically fabricated on top of CMOS chips which have 25-V pulsers and low-noise transimpedance amplifiers for each transmit and receive array elements. The fabricated CMUT arrays have 56 transmit and 48 receive elements operating at 12 MHz with a 1.4 mm outer diameter. To test the imaging performance of the optimal reduced set, we obtained a 512-element coarray set from the full 2688-element set. In the experiment, we used a phantom of 100-mu m aluminium wires immersed in oil tank. We have reconstructed both 2-D PSFs and B-scan images of wire targets. Experimental results demonstrate that the simulated annealing based optimal firing set achieves acceptable lateral and contrast resolution performances with 1/5 of the full set.Yayın Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications(IEEE-INST Electrical Electronics Engineers Inc, 2011-12) Zahorian, Jaime S.; Hochman, Michael; Xu, Toby; Satır, Sarp; Gürün, Gökçe; Karaman, Mustafa; Değertekin, Fahrettin LeventOne of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach is required to minimize the parasitic capacitances in the receive mode, especially in catheter-based volumetric imaging arrays, for which the elements must be small. Furthermore, optimization of the available silicon area and minimized number of connections occurs when the CMUTs are fabricated directly above the associated electronics. Here, we describe successful fabrication and performance evaluation of CMUT arrays for intravascular imaging on custom-designed CMOS receiver electronics from a commercial IC foundry. The CMUT-on-CMOS process starts with surface isolation and mechanical planarization of the CMOS electronics to reduce topography. The rest of the CMUT fabrication is achieved by modifying a low-temperature micromachining process through the addition of a single mask and developing a dry etching step to produce sloped sidewalls for simple and reliable CMUT-to-CMOS interconnection. This CMUT-to-CMOS interconnect method reduced the parasitic capacitance by a factor of 200 when compared with a standard wire-bonding method. Characterization experiments indicate that the CMUT-on-CMOS elements are uniform in frequency response and are similar to CMUTs simultaneously fabricated on standard silicon wafers without electronics integration. Experiments on a 1.6-mm-diameter dual-ring CMUT array with a center frequency of 15 MHz show that both the CMUTs and the integrated CMOS electronics are fully functional. The SNR measurements indicate that the performance is adequate for imaging chronic total occlusions located 1 cm from the CMUT array.