A model of AlN layer formation during ion nitriding of Al

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dc.contributor.authorDimitrov, Ventzislav Ivanoven_US
dc.date.accessioned2015-01-15T23:00:07Z
dc.date.available2015-01-15T23:00:07Z
dc.date.issued2004-11
dc.departmentIşık Üniversitesi, Fen Edebiyat Fakültesi, Fizik Bölümüen_US
dc.departmentIşık University, Faculty of Arts and Sciences, Department of Physicsen_US
dc.description.abstractA diffusion model of AlN layer formation by ion nitriding of Al is proposed based on the analysis of atomic transport during the process. This model is reduced to the following. Implantation of N ions to the surface of the specimen, named the reaction zone; extraction of Al from the substrate; diffusion transport of Al to the reaction zone through an AlN layer formed during the process; formation and growth of AlN in the reaction zone; sputtering of the AlN layer. Equations controlling the growth process have been obtained.en_US
dc.description.versionPublisher's Versionen_US
dc.identifier.citationDimitrov, V. I. (2004). A model of AlN layer formation during ion nitriding of al. Applied Physics A: Materials Science and Processing, 79(7), 1829-1832. doi:10.1007/s00339-003-2253-yen_US
dc.identifier.doi10.1007/s00339-003-2253-y
dc.identifier.endpage1832
dc.identifier.issn0947-8396
dc.identifier.issue7
dc.identifier.scopus2-s2.0-5544240606
dc.identifier.scopusqualityQ2
dc.identifier.startpage1829
dc.identifier.urihttps://hdl.handle.net/11729/143
dc.identifier.urihttp://dx.doi.org/10.1007/s00339-003-2253-y
dc.identifier.volume79
dc.identifier.wosWOS:000223464000036
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Scienceen_US
dc.indekslendigikaynakScopusen_US
dc.indekslendigikaynakScience Citation Index Expanded (SCI-EXPANDED)en_US
dc.institutionauthorDimitrov, Ventzislav Ivanoven_US
dc.language.isoenen_US
dc.peerreviewedYesen_US
dc.publicationstatusPublisheden_US
dc.publisherSpringer-Verlagen_US
dc.relation.ispartofApplied Physics A: Materials Science and Processingen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectPlasma-diffusion treatmenten_US
dc.subjectSurface modificationen_US
dc.subjectAluminumen_US
dc.subjectTransporten_US
dc.subjectMetalsen_US
dc.subjectAtomic physicsen_US
dc.subjectCorrosion resistanceen_US
dc.subjectDiffusionen_US
dc.subjectFluxesen_US
dc.subjectInterfaces (materials)en_US
dc.subjectIonsen_US
dc.subjectMathematical modelsen_US
dc.subjectSurface phenomenaen_US
dc.subjectSurfacesen_US
dc.subjectAction zonesen_US
dc.subjectIon nitridingen_US
dc.subjectSurface modificationsen_US
dc.subjectVacancy-fixed ionsen_US
dc.subjectAluminum compoundsen_US
dc.titleA model of AlN layer formation during ion nitriding of Alen_US
dc.typeArticleen_US
dspace.entity.typePublication

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