A model of AlN layer formation during ion nitriding of Al

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Küçük Resim

Tarih

2004-11

Dergi Başlığı

Dergi ISSN

Cilt Başlığı

Yayıncı

Springer-Verlag

Erişim Hakkı

info:eu-repo/semantics/closedAccess

Araştırma projeleri

Organizasyon Birimleri

Dergi sayısı

Özet

A diffusion model of AlN layer formation by ion nitriding of Al is proposed based on the analysis of atomic transport during the process. This model is reduced to the following. Implantation of N ions to the surface of the specimen, named the reaction zone; extraction of Al from the substrate; diffusion transport of Al to the reaction zone through an AlN layer formed during the process; formation and growth of AlN in the reaction zone; sputtering of the AlN layer. Equations controlling the growth process have been obtained.

Açıklama

Anahtar Kelimeler

Plasma-diffusion treatment, Surface modification, Aluminum, Transport, Metals, Atomic physics, Corrosion resistance, Diffusion, Fluxes, Interfaces (materials), Ions, Mathematical models, Surface phenomena, Surfaces, Action zones, Ion nitriding, Surface modifications, Vacancy-fixed ions, Aluminum compounds

Kaynak

Applied Physics A: Materials Science and Processing

WoS Q Değeri

Q2
Q2

Scopus Q Değeri

Q2

Cilt

79

Sayı

7

Künye

Dimitrov, V. I. (2004). A model of AlN layer formation during ion nitriding of al. Applied Physics A: Materials Science and Processing, 79(7), 1829-1832. doi:10.1007/s00339-003-2253-y