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Yayın CMUT-based volumetric ultrasonic imaging array design for forward looking ICE and IVUS applications(SPIE-Int Soc Optical Engineering, 2013) Tekeş, Coşkun; Zahorian, Jaime S.; Xu, Toby; Rashid, Muhammad Wasequr; Satır, Sarp; Gürün, Gökçe; Karaman, Mustafa; Hasler, Jennifer Olson; Değertekin, Fahrettin LeventDesigning a mechanically flexible catheter based volumetric ultrasonic imaging device for intravascular and intracardiac imaging is challenging due to small transducer area and limited number of cables. With a few parallel channels, synthetic phased array processing is necessary to acquire data from a large number of transducer elements. This increases the data collection time and hence reduces frame rate and causes artifacts due to tissue-transducer motion. Some of these drawbacks can be resolved by different array designs offered by CMUT-on-CMOS approach. We recently implemented a 2.1-mm diameter single chip 10 MHz dual ring CMUT-on-CMOS array for forward looking ICE with 64-transmit and 56-receive elements along with associated electronics. These volumetric arrays have the small element size required by high operating frequencies and achieve sub mm resolution, but the system would be susceptible to motion artifacts. To enable real time imaging with high SNR, we designed novel arrays consisting of multiple defocused annular rings for transmit aperture and a single ring receive array. The annular transmit rings are utilized to act as a high power element by focusing to a virtual ring shaped line behind the aperture. In this case, image reconstruction is performed by only receive beamforming, reducing total required firing steps from 896 to 14 with a trade-off in image resolution. The SNR of system is improved more than 5 dB for the same frequency and frame rate as compared to the dual ring array, which can be utilized to achieve the same resolution by increasing the operating frequency.Yayın An Analog beamformer for integrated high-frequency medical ultrasound imaging(IEEE, 2011) Gürün, Gökçe; Zahorian, Jaime; Tekeş, Coşkun; Karaman, Mustafa; Hasler, Paul E.; Değertekin, Fahrettin LeventWe designed and fabricated a dynamic receive beamforming integrated circuit (IC) in 0.35-mu m CMOS technology. This beamformer is suitable for integration with an ultrasound annular array for high-frequency (30-50 MHz) intravascular ultrasound (IVUS) imaging. The beamformer IC is capable of buffering, delaying and preamplification for 8 receive channels. We explored an analog delay cell based on a currentmode first-order all-pass filter, which is used as the basic building block to form an analog dynamic delay line. We also explored a bandwidth enhancement method on the delay cell that improved the overall bandwidth of the delay line by a factor of 6. Each delay cell consumes 2.1 mW of power and is capable of generating a tunable delay between 1.75 ns to 2.5 ns, enabling dynamic receive beamforming over a focal range from 1.4 mm to 2 mm. We successfully integrated the fabricated beamformer IC with an 8-element annular array. Our experimental test results demonstrated the desired buffering, preamplification and delaying capabilities of the beamformer.Yayın Dual-annular-ring CMUT array for forward-looking IVUS imaging(IEEE, 2006) Güldiken, Rasim Oytun; Zahorian, Jaime; Balantekin, Müjdat; Değertekin, Fahrettin Levent; Tekeş, Coşkun; Şişman, Alper; Karaman, MustafaWe investigate a dual-annular-ring CMUT array configuration for forward-looking intravascular ultrasound (FL-IVUS) imaging. The array consists of separate, concentric transmit and receive ring arrays built on the same silicon substrate. This configuration has the potential for independent optimization of each array and uses the silicon area more effectively without any particular drawback. We designed and fabricated a 1mm diameter test array which consists of 24 transmit and 32 receive elements. We investigated synthetic phased array beamforming with a non-redundant subset (if transmit-receive element pairs of the dual-annular-ring array. For imaging experiments, we designed and constructed a programmable FPGA-based data acquisition and phased array beamforming system. Pulse-echo measurements along with imaging simulations suggest that dual-ring-annular array should provide performance suitable for real-time FLAVUS applications.Yayın Experimental study of dual-ring CMUT array optimization for forward-looking IVUS(IEEE, 2011) Tekeş, Coşkun; Zahorian, Jaime; Gürün, Gökçe; Satir, Sarp; Hochman, Michael; Xu, Toby; Rashid, Muhammad Wasequr; Değertekin, Fahrettin Levent; Karaman, MustafaForward-looking (FL) catheters have guiding and volumetric imaging capacities which are highly desirable for IVUS applications. Large channel and firing counts have to be reduced to enable 3-D real-time imaging and simplify front-end electronics. Recently, we have proposed an optimization procedure for dual ring FL arrays which is based on finding an optimal coarray set using the simulated annealing algorithm. The presented algorithm is based on finding a predefined number of optimal firing set which results in elimination of redundant spatial frequencies in the coarray. In this study, we present the experimental demonstration of the proposed method with fabricated single chip CMUT on CMOS system based FL dual ring arrays. The dual ring CMUT arrays were monolithically fabricated on top of CMOS chips which have 25-V pulsers and low-noise transimpedance amplifiers for each transmit and receive array elements. The fabricated CMUT arrays have 56 transmit and 48 receive elements operating at 12 MHz with a 1.4 mm outer diameter. To test the imaging performance of the optimal reduced set, we obtained a 512-element coarray set from the full 2688-element set. In the experiment, we used a phantom of 100-mu m aluminium wires immersed in oil tank. We have reconstructed both 2-D PSFs and B-scan images of wire targets. Experimental results demonstrate that the simulated annealing based optimal firing set achieves acceptable lateral and contrast resolution performances with 1/5 of the full set.Yayın Forward-looking IVUS imaging using a dual-annular ring CMUT array: Experimental results(IEEE, 2007) Güldiken, Rasim Oytun; Zahorian, Jaime S.; Gürün, Gökçe; Qureshi, Muhammad Shakeel; Balantekin, Müjdat; Tekeş, Coşkun; Hasler, Paul E.; Karaman, Mustafa; Carlier, Stephane; Değertekin, Fahrettin LeventThis paper presents the experimental results on forward-looking Intravascular ultrasound (FL-IVUS) using dual-annular-ring CMUT arrays. The array has a diameter of 1mm including bondpads which consists of separate, concentric 24 transmit and 32 receive ring arrays built on the same silicon substrate. This configuration has the potential for Independent optimization of each array and uses the silicon area more effectively without any drawback. For imaging experiments, we designed and constructed a custom integrated circuit using a standard 0.5 mu m CMOS process for data acquisition. A sample pulse-echo signal received from the oil-air Interface (plane reflector) at 6mm had a center frequency of 11MHz with 95% fractional 6-dB bandwidth. The measured SNR of the echo was 24 dB with no averaging. B-scan image of a wire-phantom was generated to test the resolution.Yayın Annular CMUT arrays for side looking intravascular ultrasound imaging(IEEE, 2007) Zahorian, Jaime; Güldiken, Rasim Oytun; Gürün, Gökçe; Qureshi, Muhammad Shakeel; Balantekin, Müjdat; Değertekin, Fahrettin Levent; Carlier, Stephane; Şişman, Alper; Karaman, MustafaAlthough side looking intravascular ultrasound (SL-IVUS) imaging systems using single element piezoelectric transducers set the resolution standard in the assessment of the extent of coronary artery disease, improvements in transducer performance are needed to perform harmonic imaging and high resolution imaging of vulnerable plaque. With their small channel count; annular arrays exploiting the inherent broad bandwidth of CMUTs and electronic focusing capability of integrated electronics provide a path for desired SL-IVUS imaging catheters. In this paper, we first describe the design, low temperature fabrication of an 8401 mu m diameter, 8 element CMUT annular array. Testing of the individual elements in oil shows a uniform device behavior with 100% fractional bandwidth around 20MHz without including the effects of attenuation and diffraction. We also present linear scan imaging results obtained on wire targets in oil, tissue and tissue mimicking phantoms using both unfocused and dynamically focused transducers. The results for axial and lateral resolution are in agreement predicted by the simulations and show the feasibility of this approach for high resolution SL-IVUS imaging.Yayın Forward-looking IVUS imaging using an annular-ring CMUT array(IEEE, 2005) Değertekin, Fahrettin Levent; Karaman, Mustafa; Güldiken, Rasim OytunA 64-element, 1.15mm diameter annular-ring CMUT array was characterized and used for forward-looking IVUS imaging tests. The array was manufactured using low temperature processes suitable for CMOS electronics integration on a single chip. The 43×140µm2 array element has suitable view angle for forward looking imaging around 15MHz center frequency and pulse-echo measurements show nearly 100% fractional bandwidth around 17MHz. For imaging and SNR measurements, RF A-scan data sets from various targets were collected using an interconnect scheme forming a 32-element array configuration. The results demonstrate that annular-ring CMUT arrays fabricated with CMOS compatible processes are capable of forward-looking IVUS imaging.Yayın Front-end CMOS electronics for monolithic integration with CMUT arrays: Circuit design and initial experimental results(2008) Gürün, Gökçe; Qureshi, Muhammad Shakeel; Balantekin, Müjdat; Güldiken, Rasim Oytun; Zahorian, Jaime S.; Peng, Shengyu; Basu, Arindam; Karaman, Mustafa; Hasler, Paul E.; Değertekin, Fahrettin LeventThis paper discusses design of CMOS-ASICs for monolithic integration of CMUT arrays by post-CMOS fabrication. We describe design strategies for monolithic integration and demonstrate the advantages of CMUT-on-CMOS approach. On the same wafer, separate sets of IC cells are designed to interface different types of CMUT arrays for IVUS and ICE applications. Circuit topologies include resistive feedback transimpedance amplifiers on the receiver side, along with multiplexers and buffers. Gains and bandwidths of receiving amplifiers are optimized separately to fit different array specifications such as number of elements, element size and operation bandwidth. To drive CMUTs a high voltage pulser array is designed in the same 3.3V unmodified CMOS technology by combining existing technological layers in an unconventional way. CMUT arrays are then built on top of the custom made 8" wafer containing these circuits fabricated in a 0.35µm standard CMOS process. We present initial characterization of the CMO electronics and pulse-echo measurements obtained post-CMOS fabricated CMUT elements.Yayın Dual electrode capacitive micromachined ultrasonic transducer array for 1-D intracardiac echocardiography (ICE)(American Society of Mechanical Engineers (ASME), 2007) Güldiken, Rasim Oytun; Zahorian, Jaime S.; Karaman, Mustafa; Değertekin, Fahrettin LeventWe designed and fabricated a 64 element 1-D linear dual electrode Capacitive Micromachined Ultrasonic Transducer (CMUT) array operating at 9.5 MHz for Intracardiac Echocardiography (ICE). The dual electrode CMUT structure increases the overall sensitivity by 12.6dB (6.2dB in receive sensitivity; 6.4dB in output pressure) when compared to optimized single electrode CMUT. We report peak output pressure of 2.3MPa on the CMUT surface when 170V AC and 180V DC is applied. This significant performance increase makes the CMUT more competitive with their piezoelectric counterparts.Yayın Micromachined capacitive transducer arrays for intravascular ultrasound(SPIE, 2005) Değertekin, Fahrettin Levent; Güldiken, Rasim Oytun; Karaman, MustafaIntravascular ultrasound (IVUS) imaging has become an essential imaging modality for the effective diagnosis and treatment of cardiovascular diseases during the past decade enabled by innovative applications of piezoelectric transducer technology. The limitations in the manufacture and performance of the same piezoelectric transducers have also impeded the improvement of IVUS for emerging clinically important applications such as forward viewing arrays for guiding interventions and high resolution imaging of arterial structure such as vulnerable plaque and fibrous cap, and also implementation of techniques such as harmonic imaging of the tissue and of the contrast agents. Capacitive micromachined ultrasonic transducer (CMUT) technology shows great potential for transforming IVUS not only to satisfy these clinical needs but also to open up possibilities for low-cost imaging devices integrated to therapeutic tools. We have developed manufacturing processes with a maximum process temperature of 250°C to build CMUTs on the same silicon chip with integrated electronics. Using these processes we fabricated CMUT arrays suitable for forward viewing IVUS in the 10-20MHz range. We characterized these array elements in terms of pulse-echo response, radiation pattern measurements and demonstrated its volumetric imaging capabilities on various imaging targets.
